Titanium Sputtering Target purity 99.9% / 99.95% / 99.99% / 99.995% / 99.999% , 3N, 3N5, 4N , 4N5 ,5N .At present, same as sputtered titanium, high purity titanium of the same purity has been used in some sputtering equipment. There are 4 megabit ultra-large-scale integrated circuits that require 4N (99.995%) to 5N (99.999%) grades of titanium, and 6N (99.9999%) grades of titanium for 16 megabit u
Titanium Sputtering Target
Purity: 99.9% / 99.95% / 99.99% / 99.995% / 99.999%
Application of high purity titanium :
electronic information materials
With the rapid development of information technology, semiconductor technology and other fields, the use of high-purity titanium in sputtering targets, DRAMs (digital recording and measuring systems), flat panel displays and integrated circuits has also increased, and the purity of titanium has also increased with the higher requirement. In the industry involving semiconductor ultra-large scale integrated circuits, tungsten-titanium compounds, titanium-silicon compounds, titanium-nitrogen compounds, and the like are used as diffusion barrier layers and wiring materials to control electrodes, and sputtering is a commonly used preparation method for these materials. The titanium target used in the sputtering method has higher purity requirements, while the content of radioactive elements and alkali metals is lower.
At present, same as sputtered titanium, high purity titanium of the same purity has been used in some sputtering equipment. There are 4 megabit ultra-large-scale integrated circuits that require 4N (99.995%) to 5N (99.999%) grades of titanium, and 6N (99.9999%) grades of titanium for 16 megabit ultra-large scale integrated circuits.
| Product Name | Element | Purity | Melting Point | Density (g/cc) | Available Shapes |
| High Pure Sliver | Ag | 4N-5N | 961 | 10.49 | Wire, Sheet, Particle, Target |
| High Pure Aluminum | Al | 4N-6N | 660 | 2.7 | Wire, Sheet, Particle, Target |
| High Pure Gold | Au | 4N-5N | 1062 | 19.32 | Wire, Sheet, Particle, Target |
| High Pure Bismuth | Bi | 5N-6N | 271.4 | 9.79 | Particle, Target |
| High Pure Cadmium | Cd | 5N-7N | 321.1 | 8.65 | Particle, Target |
| High Pure Cobalt | Co | 4N | 1495 | 8.9 | Particle, Target |
| High Pure Chromium | Cr | 3N-4N | 1890 | 7.2 | Particle, Target |
| High Pure Copper | Cu | 3N-6N | 1083 | 8.92 | Wire, Sheet, Particle, Target |
| High Pure Ferro | Fe | 3N-4N | 1535 | 7.86 | Particle, Target |
| High Pure Germanium | Ge | 5N-6N | 937 | 5.35 | Particle, Target |
| High Pure Indium | In | 5N-6N | 157 | 7.3 | Particle, Target |
| High Pure Magnesium | Mg | 4N | 651 | 1.74 | Wire, Particle, Target |
| High Pure Magnesium | Mn | 3N | 1244 | 7.2 | Wire, Particle, Target |
| High Pure ssssMolybdenum | Mo | 4N | 2617 | 10.22 | Wire, Sheet, Particle, Target |
| High Pure Niobium | Nb | 4N | 2468 | 8.55 | Wire, Target |
| High Pure Nickel | Ni | 3N-5N | 1453 | 8.9 | Wire, Sheet, Particle, Target |
| High Pure Lead | Pb | 4N-6N | 328 | 11.34 | Particle, Target |
| High Pure Palladium | Pd | 3N-4N | 1555 | 12.02 | Wire, Sheet, Particle, Target |
| High Pure Platinum | Pt | 3N-4N | 1774 | 21.5 | Wire, Sheet, Particle, Target |
| High Pure Silicon | Si | 5N-7N | 1410 | 2.42 | Particle, Target |
| High Pure Tin | Sn | 5N-6N | 232 | 7.75 | Wire, Particle, Target |
| High Pure Tantalum | Ta | 4N | 2996 | 16.6 | Wire, Sheet, Particle, Target |
| High Pure Tellurium | Te | 4N-6N | 425 | 6.25 | Particle, Target |
| High Pure Titanium | Ti | 4N-5N | 1675 | 4.5 | Wire, Particle, Target |
| High Pure Tungsten | W | 3N5-4N | 3410 | 19.3 | Wire, Sheet, Particle, Target |
| High Pure Zinc | Zn | 4N-6N | 419 | 7.14 | Wire, Sheet, Particle, Target |
| High Pure Zirconium | Zr | 4N | 1477 | 6.4 | Wire, Sheet, Particle, Target |